Shear stacks
Noliac shear stacks are available as single-axis and multi-axis actuators with a stroke of up to 9 µm. Their low capacitance results in reduced power requirements for a given generated displacement. The shear stacks are used in nanopositioning, precision mechanics, active vibration cancellation, switches, semiconductor manufacturing and testing.
Products
Product type
Shear motion axes
Length
Width
Height
Operating voltage, max.
Free stroke, from -Vmax to +Vmax
Shear motion axes
XLength
5 mmWidth
5 mmHeight
1.7 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
1.5 µmShear motion axes
XLength
5 mmWidth
5 mmHeight
2.3 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
3 µmShear motion axes
XLength
5 mmWidth
5 mmHeight
3.4 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
6 µmShear motion axes
XLength
10 mmWidth
10 mmHeight
1.7 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
1.5 µmShear motion axes
XLength
10 mmWidth
10 mmHeight
2.3 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
3 µmShear motion axes
XLength
10 mmWidth
10 mmHeight
3.4 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
6 µmShear motion axes
X/YLength
5 mmWidth
5 mmHeight
2.8 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
1.5 µmShear motion axes
X/YLength
5 mmWidth
5 mmHeight
4 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
3 µmShear motion axes
X/YLength
5 mmWidth
5 mmHeight
6.4 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
6 µmShear motion axes
X/YLength
10 mmWidth
10 mmHeight
2.8 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
1.5 µmShear motion axes
X/YLength
10 mmWidth
10 mmHeight
4 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
3 µmShear motion axes
X/YLength
10 mmWidth
10 mmHeight
6.4 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
6 µmShear motion axes
X/Y/ZLength
5 mmWidth
5 mmHeight
7.4 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
1.5 µmShear motion axes
X/Y/ZLength
5 mmWidth
5 mmHeight
12.6 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
3 µmShear motion axes
X/Y/ZLength
10 mmWidth
10 mmHeight
7.4 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
1.5 µmShear motion axes
X/Y/ZLength
10 mmWidth
10 mmHeight
12.6 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
3 µmShear motion axes
X/Y/ZLength
10 mmWidth
10 mmHeight
23.1 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
6 µmShear motion axes
X/Y/ZLength
15 mmWidth
15 mmHeight
12.6 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
3 µmShear motion axes
X/Y/ZLength
15 mmWidth
15 mmHeight
23.1 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
6 µmShear motion axes
X/Y/ZLength
15 mmWidth
15 mmHeight
33.6 mmOperating voltage, max.
± 320VFree stroke, from -Vmax to +Vmax
9 µm