Piezos designed for UHV applications 

Noliac Group piezos are available in versions especially designed for ultra high vacuum, UHV, applications. Testing exhibits low outgassing levels proving the UHV compatibility even of stacked piezo actuators with glue, solder, flux and wires. 

Ultra high vacuum is the vacuum regime characterized by pressures lower than about 10⁻⁷ pascal or 100 nanopascals (~10⁻⁹ torr). Extreme cleanliness and low out gassing are essential parameters in sustaining the vacuum level in such systems. Elevated temperature compatibility is often needed since water vapour and other trace gasses are removed from the system during a "bake-out".

Design according to your application 

Noliac's piezoceramic components are made to support system development and integration of piezo technology in your UHV application.

Among many technical capabilities, Noliac is competent in producing piezo ceramic components meeting the demands on temperature compatibility and out gassing levels set by UHV operation.

  

Examples of design possibilities:
Multilayer actuator:	Shape: Square, ring, discs Dimensions: Cross section up to 70mm x 70mm PZT material: Soft doped or hard doped PZT Layer thickness: 20 µm and up  External electrodes: Screen-printing: Ag, Au or Sputtering: Ni/Cr + Au

Do not hesitate to contact Noliac Group with your specific requirements for a piezo based UHV application solution.  

Testing provides excellent results 

It is widely acknowledged that PZT materials are UHV compatible. When stacking such PZT elements the uses of glue, solder, flux and wires could compromise the otherwise inherent compatibility for device level products.

For this purpose a SCMA consisting of 4 CMA’s and 2 endplates has been prepared. The overall dimensions of the SCMA are 5mm x 5mm x 10mm, having 5 glue joints each of 20mm length. The SCMA was equipped with standard buswire and 2 Kapton coated multi-core wires of 200mm length each.

 Click here to review the technical paper on outgassing.