How it works
Compensating for mechanical tolerances, the piezoelectric actuators are used to fine tune the position of mirrors in the interferometer. The solution is compact, there is no EMI, it operates at low voltage and you gain sub-nanometer resolution.
Which piezo elements can be used for Interferometers?
Single actuators such as the NAC20XX line of actuators, could be the preferred choice for interferometry applications. With an unloaded resonance frequency above 500kHz, they will allow for precise positioning of at high frequencies. With dimensions ranging from 2x2x2mm to 15 x 15 x 2 mm, the actuators will be adapted the available footprint.
If you need more than a few microns of movement, stacking of single actuators will increase free displacement proportionally to the actuators height.