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Shear stacks

Shear stacks

Noliac shear stacks are available as single-axis and multi-axis actuators with a stroke of up to 9 µm. Their low capacitance results in reduced power requirements for a given generated displacement. The shear stacks are used in nanopositioning, precision mechanics, active vibration cancellation, switches, semiconductor manufacturing and testing.

Products

Product type
Shear motion axes
Length
Width
Height
Operating voltage, max.
Free stroke, from -Vmax to +Vmax
Shear motion axes
X
Length
5 mm
Width
5 mm
Height
1.7 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
1.5 µm
Shear motion axes
X
Length
5 mm
Width
5 mm
Height
2.3 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
3 µm
Shear motion axes
X
Length
5 mm
Width
5 mm
Height
3.4 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
6 µm
Shear motion axes
X
Length
10 mm
Width
10 mm
Height
1.7 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
1.5 µm
Shear motion axes
X
Length
10 mm
Width
10 mm
Height
2.3 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
3 µm
Shear motion axes
X
Length
10 mm
Width
10 mm
Height
3.4 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
6 µm
Shear motion axes
X/Y
Length
5 mm
Width
5 mm
Height
2.8 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
1.5 µm
Shear motion axes
X/Y
Length
5 mm
Width
5 mm
Height
4 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
3 µm
Shear motion axes
X/Y
Length
5 mm
Width
5 mm
Height
6.4 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
6 µm
Shear motion axes
X/Y
Length
10 mm
Width
10 mm
Height
2.8 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
1.5 µm
Shear motion axes
X/Y
Length
10 mm
Width
10 mm
Height
4 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
3 µm
Shear motion axes
X/Y
Length
10 mm
Width
10 mm
Height
6.4 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
6 µm
Shear motion axes
X/Y/Z
Length
5 mm
Width
5 mm
Height
7.4 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
1.5 µm
Shear motion axes
X/Y/Z
Length
5 mm
Width
5 mm
Height
12.6 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
3 µm
Shear motion axes
X/Y/Z
Length
10 mm
Width
10 mm
Height
7.4 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
1.5 µm
Shear motion axes
X/Y/Z
Length
10 mm
Width
10 mm
Height
12.6 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
3 µm
Shear motion axes
X/Y/Z
Length
10 mm
Width
10 mm
Height
23.1 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
6 µm
Shear motion axes
X/Y/Z
Length
15 mm
Width
15 mm
Height
12.6 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
3 µm
Shear motion axes
X/Y/Z
Length
15 mm
Width
15 mm
Height
23.1 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
6 µm
Shear motion axes
X/Y/Z
Length
15 mm
Width
15 mm
Height
33.6 mm
Operating voltage, max.
± 320V
Free stroke, from -Vmax to +Vmax
9 µm

Options

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Performance Dimensions
Value
Max operating voltage / V
Min
Min free stroke / µm
Min
Min estimated blocking force / N
Min
Min
Max
Length or outer diameter / mm
Min
Max
Width or inner diameter / mm
Min
Max
Max height / mm
Max
Product category
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Material
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  • NCE51
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